Study on Electronic Excitation Temperature of Argon Plasma Using Low Pressure Micro-ICP Excitation Source
Electronic excitation temperature is an important indicator of the spectrometer excitation source. This work experimented self-made micro-ICP excitation spectroscopy based on PCB technology, and detected 17 spectral lines in 690~860 nm of argon atom. 763.51 nm and 772.42 nm spectral lines whose wavelengths are close to were used to calculate electronic excitation temperature of argon excited by micro-ICP, and results show in 1600~3000 K. Experimental test data shows effects of argon gas pressure on electronic excitation temperature that in 20~210 Pa electronic excitation temperature increases with pressure on the whole. When argon pressure is greater than 220 Pa, plasma flame flickers and the electronic excitation temperature shows greater fluctuation; Experimental test shows effects of RF power on electronic excitation temperature that in 3~23 W electronic excitation temperature gradually increases with RF power. Causes of electronic excitation temperature with pressure, RF power variation are analyzed.
Y. Q. Wang et al., "Study on Electronic Excitation Temperature of Argon Plasma Using Low Pressure Micro-ICP Excitation Source", Advanced Materials Research, Vols. 383-390, pp. 1844-1848, 2012