Study on Electronic Excitation Temperature of Argon Plasma Using Low Pressure Micro-ICP Excitation Source

Abstract:

Electronic excitation temperature is an important indicator of the spectrometer excitation source. This work experimented self-made micro-ICP excitation spectroscopy based on PCB technology, and detected 17 spectral lines in 690~860 nm of argon atom. 763.51 nm and 772.42 nm spectral lines whose wavelengths are close to were used to calculate electronic excitation temperature of argon excited by micro-ICP, and results show in 1600~3000 K. Experimental test data shows effects of argon gas pressure on electronic excitation temperature that in 20~210 Pa electronic excitation temperature increases with pressure on the whole. When argon pressure is greater than 220 Pa, plasma flame flickers and the electronic excitation temperature shows greater fluctuation; Experimental test shows effects of RF power on electronic excitation temperature that in 3~23 W electronic excitation temperature gradually increases with RF power. Causes of electronic excitation temperature with pressure, RF power variation are analyzed.

• Periodical: Advanced Materials Research (Volumes 383-390)
• Pages: 1844-1848
• DOI: https://doi.org/10.4028/www.scientific.net/AMR.383-390.1844
• Online since: November 2011
• Authors: Yong Qing Wang, Na Chong, Li Mei Dong, Yu Jun Tang, Hai Jun Song
• Keywords: Electronic Excitation Temperature, Emission Spectrometer, Excitation Source, Micro-ICP

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