Study on Start Burning Performance of Micro-ICP Using Stereo Spiral Coil

Yong Qing Wang; Na Chong; Rong Xia Sun; Ying Chang Zhou; Wen Jun Chen

doi:10.4028/www.scientific.net/AMR.383-390.390

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HomeAdvanced Materials ResearchAdvanced Materials Research Vols. 383-390Study on Start Burning Performance of Micro-ICP...

Study on Start Burning Performance of Micro-ICP Using Stereo Spiral Coil

Abstract:

According to the problem of low energy utilization of plane spiral coil used in micro-ICP, a kind of micro stereo helical coil was designed. Made 24 different structural parameters of stereo spiral coil whose diameter range 3~10 mm. Using comprehensive experimental method tested different parameters’ coils inspire argon plasma. In 13.56MHz RF power, relationships between argon pressure, coil turns, coil diameter and combustion /maintaining power of micro-ICP excitation source were tested. From spectrometer observed 17 argon emission spectrum in 690~860 nm. Spectral lines intensity influenced by RF power and work pressure. Experiments proved that micro-ICP excitation source using stereo helical coil is feasible. It can form Ar plasma and inspire Ar spectral lines.

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Periodical:

Advanced Materials Research (Volumes 383-390)

Pages:

390-394

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.383-390.390

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Online since:

November 2011

Authors:

Yong Qing Wang, Na Chong, Rong Xia Sun, Ying Chang Zhou, Wen Jun Chen

Keywords:

Combustion Performance, Micro-ICP, Stereo Spiral Coil, Structural Parameter

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