Study on Start Burning Performance of Micro-ICP Using Stereo Spiral Coil

Abstract:

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According to the problem of low energy utilization of plane spiral coil used in micro-ICP, a kind of micro stereo helical coil was designed. Made 24 different structural parameters of stereo spiral coil whose diameter range 3~10 mm. Using comprehensive experimental method tested different parameters’ coils inspire argon plasma. In 13.56MHz RF power, relationships between argon pressure, coil turns, coil diameter and combustion /maintaining power of micro-ICP excitation source were tested. From spectrometer observed 17 argon emission spectrum in 690~860 nm. Spectral lines intensity influenced by RF power and work pressure. Experiments proved that micro-ICP excitation source using stereo helical coil is feasible. It can form Ar plasma and inspire Ar spectral lines.

Info:

Periodical:

Advanced Materials Research (Volumes 383-390)

Edited by:

Wu Fan

Pages:

390-394

DOI:

10.4028/www.scientific.net/AMR.383-390.390

Citation:

Y. Q. Wang et al., "Study on Start Burning Performance of Micro-ICP Using Stereo Spiral Coil", Advanced Materials Research, Vols. 383-390, pp. 390-394, 2012

Online since:

November 2011

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Price:

$35.00

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