Study on Start Burning Performance of Micro-ICP Using Stereo Spiral Coil
According to the problem of low energy utilization of plane spiral coil used in micro-ICP, a kind of micro stereo helical coil was designed. Made 24 different structural parameters of stereo spiral coil whose diameter range 3~10 mm. Using comprehensive experimental method tested different parameters’ coils inspire argon plasma. In 13.56MHz RF power, relationships between argon pressure, coil turns, coil diameter and combustion /maintaining power of micro-ICP excitation source were tested. From spectrometer observed 17 argon emission spectrum in 690~860 nm. Spectral lines intensity influenced by RF power and work pressure. Experiments proved that micro-ICP excitation source using stereo helical coil is feasible. It can form Ar plasma and inspire Ar spectral lines.
Y. Q. Wang et al., "Study on Start Burning Performance of Micro-ICP Using Stereo Spiral Coil", Advanced Materials Research, Vols. 383-390, pp. 390-394, 2012