An Optimal Design Method Based on Feature Technology for Micro Device
A method for generating fabricating information of micro device from a feature-based design model is presented. With cooperative design mode, the process model derivation and optimization are accomplished simultaneously. This work provides designer a more intuitive way to design product by means of process verification to improve manufacturability. The key enabling technologies are introduced briefly.
Z. Liu and H. Chen, "An Optimal Design Method Based on Feature Technology for Micro Device", Advanced Materials Research, Vols. 383-390, pp. 440-446, 2012