An Optimal Design Method Based on Feature Technology for Micro Device

Abstract:

Article Preview

A method for generating fabricating information of micro device from a feature-based design model is presented. With cooperative design mode, the process model derivation and optimization are accomplished simultaneously. This work provides designer a more intuitive way to design product by means of process verification to improve manufacturability. The key enabling technologies are introduced briefly.

Info:

Periodical:

Advanced Materials Research (Volumes 383-390)

Edited by:

Wu Fan

Pages:

440-446

DOI:

10.4028/www.scientific.net/AMR.383-390.440

Citation:

Z. Liu and H. Chen, "An Optimal Design Method Based on Feature Technology for Micro Device", Advanced Materials Research, Vols. 383-390, pp. 440-446, 2012

Online since:

November 2011

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Price:

$35.00

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