An Optimal Design Method Based on Feature Technology for Micro Device

Abstract:

A method for generating fabricating information of micro device from a feature-based design model is presented. With cooperative design mode, the process model derivation and optimization are accomplished simultaneously. This work provides designer a more intuitive way to design product by means of process verification to improve manufacturability. The key enabling technologies are introduced briefly.

• Periodical: Advanced Materials Research (Volumes 383-390)
• Pages: 440-446
• DOI: https://doi.org/10.4028/www.scientific.net/AMR.383-390.440
• Online since: November 2011
• Authors: Zheng Liu, Hua Chen
• Keywords: Component, Cooperative Design, Feature Model, Micro-Electromechanical System (MEMS), MUMPs, Surface Micromachining

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