Iterative Learning Cross-Coupled Control for XY Table Based on Real-Time Contour Error Estimation
The contour accuracy of XY table directly driven by two linear motors was influenced by the complicated reel-time contour error model of free-form curves, uncertainty external disturbance and dynamic matching between X axis and Y axis. To establish XY table model that easily calculated and suitable for free-form curves, real-time contour error estimate method was adopted. In order to reduce uncertainty external disturbance and dynamic matching between X axis and Y axis, the iterative learning cross-coupled controller (ILCCC) was designed for current compensation on X axis and Y axis. Simulation results show that the control scheme can enhance the robustness of the system, and effectively improve the XY table of contour precision.
L. M. Wang et al., "Iterative Learning Cross-Coupled Control for XY Table Based on Real-Time Contour Error Estimation", Advanced Materials Research, Vols. 383-390, pp. 7054-7059, 2012