Laser Reflow Technology on High-Q Toroidal Microcavity

Abstract:

Optical microcavities confine light to small model volumes and have ultrahigh quality factor (Q), especially microtoroid cavities, having very broad application prospects. In this paper, we use MEMS (Microelectromechanical System) skills, such as lithography, dry etching to fabricated silica optical microdisks. And after that, a novel processing method based on CO₂ laser reflow technology is introduced to create microtoroid cavities. The processing details are discussed including light path, laser power and other important parameters. The quality factor of the planar microtoroid cavity was measured by taper-fiber coupling and the average value reach 4.8×10⁵.

• Periodical: Advanced Materials Research (Volumes 403-408)
• Pages: 4338-4343
• DOI: https://doi.org/10.4028/www.scientific.net/AMR.403-408.4338
• Online since: November 2011
• Authors: Peng Fei Jia, Ying Zhan Yan, Shu Bin Yan, Min Zhao
• Keywords: CO₂ Laser, Micro-Process, Micro-Toroid Cavity, Planar, Quality Factor

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