Thickness Distribution Model of Condensate on Rotary Substrate by EB-PVD

Jun Shi; Guang Ping Song; Chuan Xin Zhang; Yue Sun; Xiu Lin; Ming Wei Li; Xiao Dong He

doi:10.4028/www.scientific.net/AMR.418-420.1031

Paper Titles

Mechanism Analysis and Experiment Study on RC Composite Core Walls
p.1008

The Morphology Evolution of Vapour Phase Aluminide Coating on a CMSX4 Single Crystal Superalloy
p.1012

Idealisation and Formulation in Structural Dynamics Using Modal Analysis
p.1022

Impact of Shaft Coaxiality on the Local Stiffness of Angular Contact Ball Bearing
p.1026

Thickness Distribution Model of Condensate on Rotary Substrate by EB-PVD
p.1031

Deformation and Heat Transfer Analysis for High Speed Dieless Drawing of AZ31 Magnesium Alloy Tubes
p.1036

Inhomogeneous 3D Finite Element Model for Prediction of Free Surface Roughening
p.1040

Electrical and Flexural Properties of Copper and Graphite Filled Phenolic Resin Composites
p.1044

Research on the Counterweight in the Process of Diamond Wire Saw Cutting Polysilicon
p.1048

HomeAdvanced Materials ResearchAdvanced Materials Research Vols. 418-420Thickness Distribution Model of Condensate on...

Thickness Distribution Model of Condensate on Rotary Substrate by EB-PVD

Abstract:

Large-size Ni-based alloy sheet was prepared by electron beam physical vapor deposition (EB-PVD). Thickness uniformity of large-size sheet for application is important. Based on the Knudsen’s cosine law and the character of the evaporation during EB-PVD, thickness distribution model of condensate on rotary substrate by EB-PVD was established. The thickness model is not consistent with the traditional cosine law, but cosnθ relationship, n=5.3 in this paper. The predicted data of thickness model agrees well with the measured data. The thickness distribution model is not limited to specific vapor source material, therefore, it provides significant insight on the thickness distribution profile for film, coating and sheet deposited on the rotary substrate by EB-PVD.

You might also be interested in these eBooks

Materials Processing Technology, ICAMMP2011

View Preview

Info:

Periodical:

Advanced Materials Research (Volumes 418-420)

Pages:

1031-1035

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.418-420.1031

Citation:

Cite this paper

Online since:

December 2011

Authors:

Jun Shi, Guang Ping Song, Chuan Xin Zhang, Yue Sun, Xiu Lin, Ming Wei Li, Xiao Dong He

Keywords:

EBPVD, Rotary Substrate, Sheet, Thickness Distribution Model

Export:

RIS, BibTeX

Price:

Permissions CCC:

Request Permissions

Permissions PLS:

Request Permissions

Сopyright:

Citation:

References

[1] C. Capdevila a, U. Miller b: Materials Science and Engineering A316 (2001), p.161.

Google Scholar

[2] Jinfeng Huang, Xiaorong Fu: Journal of functional materials 29 (1998), p.152.

Google Scholar

[3] C. Rebholz, M.A. Monclus: Surface ＆ Coatings Technology 201 (2007) , p.6078.

Google Scholar

[4] U.Schulz, M.Schmücker: Materisl Science and Engineering A276 (2000), p.1.

Google Scholar

[5] Jian Yi, Xiaodong He, Yue Sun, Yao Li: Applied Surface Science 253 (2007), p.4361.

Google Scholar

[6] Z.H. Xu, L.M. He, R.D. Mu, S.M. He, G.H. Huang, X.Q. Cao: Applied Surface Science 256 (2010) , p.3661.

Google Scholar

[7] Deming Zhang, Guiqing Chen: Rare Metal Materials and Engineering 36 (2007) , p.973.

Google Scholar

[8] Dheepa Srinivasan, Reed Corderman: Materials Science and Engineering A416 (2006), p.211.

Google Scholar

[9] Peifu Gu: Film Technology (Zhejiang university publishing company, China 1990).

Google Scholar

[10] Xuedan Li, Yingchao Wan: Vacuum Deposition Technology (Zhejiang university publishing company, China 1994).

Google Scholar