Research on Bias and Linearity Analysis of MEMS Measurement System Based on Minitab

Abstract:

In this paper， conception and method of bias and linearity analysis of measurement system are introduced , Minitab software are used to analyze bias and linearity of measurement system of MEMS microphone frequency response and sensitivity, conception of composite measurement system is put forward, and having effectively analyzed for it .According to the study result, the method which use whole bias value correct measurement system is discovered ,and forecast the improved measurement by using Minitab software system, after it is used product practice , greatly enhances reliability of measure data of MEMS microphone measurement system.

• Periodical: Advanced Materials Research (Volume 421)
• Pages: 410-414
• DOI: https://doi.org/10.4028/www.scientific.net/AMR.421.410
• Online since: December 2011
• Authors: Jin Wei Yu
• Keywords: Bias, Composite Measurement System, Linearity Analysis, Measure Data, Micro-Electromechanical System (MEMS), Minitab

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