The influence of addition of Y2O3 on the structure of ZrO2 thin films and bulk material was studied employing X-ray diffraction (XRD) analysis. The films were prepared by the electron-beam evaporation method. XRD analysis permits the study of the stabilization process. For pure ZrO2 thin film and coating material, the crystallographic structure is monoclinic phase; with increasing Y2O3 mole percent, the structure of Y2O3 stabilized ZrO2 (YSZ) material changes from a mixture of monoclinic and cubic phase to a single cubic phase. Furthermore, calculated results of grain size show that YSZ thin film and coating material have the same crystallization trend.