Study on Optical Constants of DLC Thin Films Based on Modified Genetic Algorithm

Jian Chao Li; Jun Hong Su

doi:10.4028/www.scientific.net/AMR.462.33

Paper Titles

A Real-Time Visualization Method of Objects Using Grid Coding Based on Surface Orientation and Structure
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Particle Filtering for Blind Equalization with Unknown Noise Variance
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Simulated Annealing Algorithm Application on Inverting Optical Constants of Thin Films
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The Flow Characteristics Analysis of Transonic around Delta-Wing to Separate Water from Natural Gas
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Study on Optical Constants of DLC Thin Films Based on Modified Genetic Algorithm
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Microfabricated Fiber Probe by Combination of Electric Arc Discharge and Chemical Etching Techniques
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Design of Thin Film Electroluminescent (TFEL) Display Panel Driver
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Proton Exchange Membrane Fuel Cell Lumped Modeling and Simulation
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Single Crystal Alloy on the Creep Behavior of Holes in Three-Dimensional Finite Element Simulation
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HomeAdvanced Materials ResearchAdvanced Materials Research Vol. 462Study on Optical Constants of DLC Thin Films Based...

Study on Optical Constants of DLC Thin Films Based on Modified Genetic Algorithm

Abstract:

This document modified the basic genetic algorithm three important operator—selection operator, mutation operator, crossover operator drawing from competition, selection, and fitness niche adjustment idea. Take the unbalanced magnetron sputtering deposition of DLC films on Si substrate as a research sample. When fitting wavelength range is 300 ~ 1500nm, select a point every 1nm, the fitting lasting time is no more than 6s. Fitting results contrast to ellipsometer’s fitting results; the error is less than 2%. Experiments show that: the adaptive modified is effective in preventing the "premature" phenomenon, searched the global optimal, reduces the requirements on the operator to set the initial value on the fitted model and is effectiveness to fit thin film optical constants.