New Ways of Improving the Property of the Piezoelectric Fluidic Angular Rate Sensor

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Abstract:

New ways of improving the property of the piezoelectric fluidic angular rate sensor are described in the paper. According to the improved schemes of the structure and the process, the repeatability of null voltage, the cross-coupling and stability of the sensor are improved. The numerical results have shown that the repeatability of null voltage increases from 0.2°/S to 0.1°/S and the cross-coupling decreases from 2% to 1%.

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587-591

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February 2012

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© 2012 Trans Tech Publications Ltd. All Rights Reserved

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