Structure Design of Piezoresistive High-g Acceleration Sensor and Finite Element Analysis

Li Shuang Liu; Han Chang Zhou; Jing Han Ye; Hua Ling Guo

doi:10.4028/www.scientific.net/AMR.466-467.1358

Paper Titles

Modeling and Simulation of Brushless DC Motor Adaptive Fuzzy PID Control System for Pure Electric Vehicle
p.1339

Modeling and Simulation of Permanent Magnet Synchronous Motor for Pure Electric Vehicle Based on Space Vector Pulse Width Modulation
p.1344

Study of Precise Measurement Algorithm Based on Machine Vision
p.1349

Research on ANN Dynamic Inversion Control of UAV
p.1353

Structure Design of Piezoresistive High-g Acceleration Sensor and Finite Element Analysis
p.1358

The Control Simulation Analysis of MATLAB-Based High-Precision Numerical Control Welding Positioner
p.1363

A Hardware-in-Loop Simulation System for Crush Natural Gas Turbo Engine
p.1368

The On-Line Monitoring System of Tower Crane Load Based on FLNN
p.1373

Intelligent Test System of Helicopter Autopilot
p.1378

HomeAdvanced Materials ResearchAdvanced Materials Research Vols. 466-467Structure Design of Piezoresistive High-g...

Structure Design of Piezoresistive High-g Acceleration Sensor and Finite Element Analysis

Abstract:

On the basis of the acceleration measurement of high impact, a high-g acceleration sensors of the piezoresistive beam - island structure at four-terminal all fixed supported was designed. Its structure was analyzed. The reasonable structure parameters were chose. And the parameter simulation and modal analysis were completed with ANSYS software. The results show that the sensor can resist 200,000 g overload and meet high impact test requirements.