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Fabrication of Microfluidic Chip and Test of a Hydro-Focusing Based on Sheath Flow

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Abstract:

Silicon etching is an essential process step for the fabrication of micro-electro-mechanical systems (MEMS). However, the rough edge of the silicon etching technology has some resistance to microspheres. This study presents fabrication process of the SU-8 photoresists mold which provides sharp edges and smooth sidewalls of the channel and details the RIE bonding of PDMS and glass substrate to realize the fabrication of microfluidic chips. This paper also investigates the hydrodynamic focusing and microsphere single-pass based on sheath flow with the aid of the plunger piston, which is important to the further combination of the microfluidic chip and the flow cytometry.

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Periodical:

Advanced Materials Research (Volumes 468-471)

Pages:

1697-1701

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.468-471.1697

Citation:

Cite this paper

Online since:

February 2012

Authors:

Rui Xia Yang, Chen Xin, Peng Gao, Fan Yang

Keywords:

Hydro-Focusing, Microfluidic Chip, Microsphere Single-Pass, SU-8

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© 2012 Trans Tech Publications Ltd. All Rights Reserved

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