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Designing and Simulation of a Multi-Direction Tiny Force Switch

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Abstract:

This paper describes the designing and producing of a multi-direction tiny force switch, which is based on the technology of micro-surface processing on privative silicon. The switch is mainly formed by shore, overhanging spring, movable electrode and fixed electrode. Its’ structure material is Ni. The parameters of switch are confirmed by doing finite-element analysis with ANSYS. And rigidities of structure both on horizontal direction and vertical direction are analyzed by using ANSYS to ensure that the uniformity of switch rigidity is qualified. After producing the switch, the rigidity of switch is tested by using bonding tester. The test result shows that the rigidity is almost qualified with requirements.

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Periodical:

Advanced Materials Research (Volumes 468-471)

Pages:

895-898

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.468-471.895

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Online since:

February 2012

Authors:

Tao Huang, Zhuo Qing Yang, Gui Fu Ding, Xiao Lin Zhao

Keywords:

endoscope, MEMS, Multi Directional, Pressure Switch, Three-Dimension

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© 2012 Trans Tech Publications Ltd. All Rights Reserved

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