Micro-Forming of Au49Ag5.5Pd2.3Cu26.9Si16.3 Metallic Glasses in Supercooled Region

C.W. Tang; Y.C. Chang; T.T. Wu; J.C. Huang; C.T. Pan

doi:10.4028/www.scientific.net/AMR.47-50.266

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HomeAdvanced Materials ResearchAdvanced Materials Research Vols. 47-50Micro-Forming of Au49Ag5.5Pd2.3Cu26.9Si16.3...

Micro-Forming of Au₄₉Ag_5.5Pd_2.3Cu_26.9Si_16.3 Metallic Glasses in Supercooled Region

Abstract:

This study presents the hot embossing micro-forming of the V-groove and micro-lens array on the Au-based bulk metallic glasses (BMGs). The thermal and thermomechanical properties were firstly investigated by using thermomechanical analysis (TMA). Based on the results, the temperature of the hot embossing experiment was set at 177oC. The formability of the Au-based BMGs were evaluated under different embossing pressures and time durations, and the results showed the increasing trend of the forming quality with increasing forming pressure and time. The Au-based BMGs are considered to be promising for micro-electro-mechanical system applications.