Kinetic Study of PZT Inertial Micro Rotary Actuator

Abstract:

Based by controlling the orderly changes of friction force between the PZT rotary actuator and supporting faces in mechanical way, a novel kind of inertial piezoelectric rotary actuator is proposed. the dynamic simulation model of the actuator based on karnopp friction model is established, by using matlab software, Four ordered Runge-Kutta calculation method is used to carry out kinematics simulation of the actuator, the curve of driving signal frequency、voltage and dynamic characteristics is conducted, the prototype of rotary actuator is designed and manufactured, the performance of the actuator is tested，The experimental results show that the developed actuator is characterized by large travel (360º) , good resolution (15µrad) , high speed (0.26rad/s) , and work stability. The motion theory and dynamic formulation of the actuator are proved through comparing the results of simulation and experiment.

• Periodical: Advanced Materials Research (Volumes 472-475)
• Pages: 2410-2414
• DOI: https://doi.org/10.4028/www.scientific.net/AMR.472-475.2410
• Online since: February 2012
• Authors: Ji Jie Ma, Jian Ming Wen, Guang Ming Cheng, Ning Li, Yong Hua Jiang
• Keywords: Inertial Drive, Piezoelectric Actuator, Rotary Actuator

References

[1] WUT, PAUL I R. Dynamic peak amplitude analysis and bonding layer effects of piezoelectric bimorph cantilevers. Smart Materials and Structure, 2004,13（1）:203-210.

DOI: 10.1088/0964-1726/13/1/024

[2] Shaoze Yan, Fuxing Zhang A 3-DOFs mobile robot driven by a piezoelectric actuator Smart Materials. Structure[J]. 2006,15: 7-13.

[3] Yung-Tien Liu, Toshiro Higuchi, Rong-Fong Fung. A novel precision positioning table utilizing impact force of spring-mounted piezoelectric actuator-partI: experimental design and results[J]. Precision Engineering,2003, (27(1)：14-21.

DOI: 10.1016/s0141-6359(02)00180-0

[4] Wu Tao, Paul I Ro. Dynamic Peak Amplitude Analysis and Bonding Layer Effects of Piezoelectric Bimorph Cantilevers[J]. Smart Materials and Structurec 2004, 13(1): 203-210.

DOI: 10.1088/0964-1726/13/1/024

[5] CHI Dong-Xiang, YAN Guo-ZHeng, DIN Guo-Qing. Inertial-friction based 4 D.O.F. Microactuator driven by PZT[J]. Optics and precision Engineering, 2001,9(2):135-138(in Chinese)

[6] Yung-Tien Liu and Toshiro Higuchi．Precision Positioning Device Utilizing Impact Force of Combined Piezo-Pneumatic Actuator[J].IEEE/ASME Transactions on Mechatronics, 2001.4(6):467-473.

DOI: 10.1109/3516.974860

[7] Karnopp D. Computer simulation of stick-slip friction in mechanical dynamic system[J]. ASME Journal of Dynamic System Measurement and Control, 1985,107(1):100-103

DOI: 10.1115/1.3140698