Investigation on Laser Etch-Machining Underwater Based on Thermal-Mechanical Effect

Wei Ping Mao; Zhao Yang Zhang; Yao Min Wang; Zhong Yang Li; Chang Liang Qi; Jie Yin

doi:10.4028/www.scientific.net/AMR.472-475.2430

Paper Titles

Kinetic Study of PZT Inertial Micro Rotary Actuator
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Influence of the Key Factors on the Wall Slip Phenomenon in Micro Flow
p.2415

The Mechanism of Surface Trajectories and Milling Forces in Micro-Milling Processing
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A Simulation Study on Rod Electrode Wear in Micro-EDM
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Investigation on Laser Etch-Machining Underwater Based on Thermal-Mechanical Effect
p.2430

Multi-Resolution Analysis of Critical Dimension Line Edge Roughness
p.2436

Model Building and Interface Friction Research of Micro Cutting
p.2444

The Deposition and Removal Process for Micro Machining Based on Electrical Discharge
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Synthesis of CdMoO₄ Microcrystals by a Molten Salt Method
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HomeAdvanced Materials ResearchAdvanced Materials Research Vols. 472-475Investigation on Laser Etch-Machining Underwater...

Investigation on Laser Etch-Machining Underwater Based on Thermal-Mechanical Effect

Abstract:

The method of high-energy short pulse laser etching underwater based on thermal - mechanical effect was put forward. In the experiment system with mask and salt solution , heat affected zone was visible decrease and the image of mask was micro-copied at the workpiece surface. Owing to the photochemical reaction and thermal-mechanical coupling effect, uniform line width of 120μm can be obtained.

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Advanced Manufacturing Technology, ICMSE 2012

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Periodical:

Advanced Materials Research (Volumes 472-475)

Pages:

2430-2435

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.472-475.2430

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Online since:

February 2012

Authors:

Wei Ping Mao, Zhao Yang Zhang, Yao Min Wang, Zhong Yang Li, Chang Liang Qi, Jie Yin

Keywords:

Etch-Machining, Nanosecond Pulse Laser, Plasma Shock Wave, Thermal-Mechanical Effect

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