Research on Load-Bearing Characteristics of Precision Air-Bearing Rotary Stage

Jie Qiong Lin; Lei Wang; Ming Hui Gao; Tong Huan Ran

doi:10.4028/www.scientific.net/AMR.479-481.2129

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HomeAdvanced Materials ResearchAdvanced Materials Research Vols. 479-481Research on Load-Bearing Characteristics of...

Research on Load-Bearing Characteristics of Precision Air-Bearing Rotary Stage

Abstract:

Air-bearing is a core component of air-bearing rotary stage. The weakness that the air-bearing has the low load capacity and stiffness has been concerned about by domestic and foreign scholars. So how to improve the load capacity and stiffness has become a serious problem. In order to improve the load capacity and stiffness of the air-bearing rotary stage, in this paper, we improved structure of Zhang Wenjie and others’ high-precision direct-drive air-bearing rotary stage. The gas film of air-bearing has been meshed by GAMBIT software, and we use FLUENT software to obtain the carrying capacity features of the gas film. Finally, the structural static force of the precision air-bearing rotary stage will be analyzed by ANSYS software. The analysis results show that: the structural design of the precision air-bearing rotary stage is reasonable, and this structure can provide a larger range of loads. Even in heavy load conditions, a larger deformation will not occur any more. It has a good practical value, and also can be widely used in high precision equipments.

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Periodical:

Advanced Materials Research (Volumes 479-481)

Pages:

2129-2134

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.479-481.2129

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Online since:

February 2012

Authors:

Jie Qiong Lin, Lei Wang, Ming Hui Gao, Tong Huan Ran

Keywords:

Air-Bearing Rotary Stage, FLUENT Analysis, Gas Film Meshing, Structural Static Analysis

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