Design and Simulation of a Novel Check Valve Made by SU-8

Abstract:

In this paper, we describe the design, simulation of a novel check valve suitable for potentially embedding in polymeric microfluidic devices such as micro-pumps. Using SU-8 as functional material, the check valve can be fabricated by MEMS technology, such as, UV-LIGA and electroforming. The check valve mainly consists of two structural layers: inlet layer and valve membrane layer. From simulation, the maximum deflection of check valve membrane is 116μm under pressure of 2000Pa, and the maximum stress is 18.1MPa. We consider the fit thickness of valve membrane is 20μm. Simulation results demonstrate that this novel check valve can be potentially integrated in many micro-pumps and other lab-on-a-chip systems.

• Periodical: Advanced Materials Research (Volumes 479-481)
• Pages: 2271-2274
• DOI: https://doi.org/10.4028/www.scientific.net/AMR.479-481.2271
• Online since: February 2012
• Authors: Tai Guo, Cong Chun Zhang, Gui Fu Ding
• Keywords: MEMS, Micro Check Valve, SU-8

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