Synthesis of Monodispersed CeO2 Nanoparticles Induced by Microwave Irradiation in Alcohol/Water Mixed Solvent and their Application in CMP

Yang Chen; Wei Bin Mu; Zhao Fang Tang; Ya Juan Zhu; Zhi Gang Chen

doi:10.4028/www.scientific.net/AMR.479-481.376

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HomeAdvanced Materials ResearchAdvanced Materials Research Vols. 479-481Synthesis of Monodispersed CeO2 Nanoparticles...

Synthesis of Monodispersed CeO₂ Nanoparticles Induced by Microwave Irradiation in Alcohol/Water Mixed Solvent and their Application in CMP

Abstract:

CeO₂ nanoparticles were synthesized by homogeneous precipitation in mixed solvent of alcohol and deionized water under microwave radiation using Ce(NO₃)₃•6H₂O and HMT as starting materials. The structure and morphology of the products were characterized by X-ray diffraction (XRD), transmission electron microscopy (TEM), selected-area electron diffraction (SAED), and BET-N₂. The oxide chemical mechanical polishing (CMP) behavior of the as-papered CeO₂ abrasives was investigated by atomic force microscope (AFM). The results indicated that the obtained CeO₂ particles were monodispersed with an average diameter of ca. 10 nm. There was a quite good consistency in the particle sizes from TEM and BET analyses. Polishing tests showed that the as-prepared ceria abrasives exhibited a good oxide CMP performance, which might attribute to the uniform size and shape of the as-prepared CeO₂ particles. In addition, the polishing pressure had an obvious influence on the surface topography, profilogram and roughness.

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Periodical:

Advanced Materials Research (Volumes 479-481)

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376-380

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.479-481.376

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Online since:

February 2012

Authors:

Yang Chen, Wei Bin Mu, Zhao Fang Tang, Ya Juan Zhu, Zhi Gang Chen

Keywords:

CeO₂, CMP, Microwave Irradiation, Monodispersed Particles

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