Design and Fabrication of an Improved MEMS-Based Piezoresistive Pressure Sensor

Zi Jun Song; Xiang Wang; Yan Li; Hai Sheng San; Yu Xi Yu

doi:10.4028/www.scientific.net/AMR.482-484.318

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HomeAdvanced Materials ResearchAdvanced Materials Research Vols. 482-484Design and Fabrication of an Improved MEMS-Based...

Design and Fabrication of an Improved MEMS-Based Piezoresistive Pressure Sensor

Abstract:

An improved piezoresistive pressure sensor is designed for harsh environment application. The highlight of this design is that the Wheatstone bridge circuit is put in lower surface of pressure diaphragm and sealed in the vacuum pressure cavity. The bridge circuit is led out by embedded Al electrodes on bonding surface. ANSYS software has been used to analyze the stress distribution of the diaphragm. By using the MEMS technology, the pressure sensor with the dimension of 1.5mm×1.5mm×500µm is fabricated. The performance of piezoresistive pressure sensor, including output, sensitivity, and nonlinearity, are investigated. The test results show that sensitivity is 20mV/V-MPa and maximum nonlinearity is 2.73%, which meet the requirements for the modern industry.