Design and Fabrication of a Micro-Actuator Based on Electromagnetic Membrane Device

Abstract:

The purpose of this study is to develop a micro electro-magnetic actuator manufactured by MEMS-based fabrication and electroplating techniques. This actuator presented a novel technique in the electromagnetic fabrication and smaller physical size than the traditional counterparts for micro actuators and provides a faster response time and lower cost. A micro coil structure is released from FeCl3 etchant and bonded on a thin film (Parafilm”M”, Pechiney Plastic Packaging Inc.) to achieve an actuator-membrane structure. When an external AC power is applied to a micro coil, a magnetic field is created to attract and repel through an NdFeB permanent magnet, and the displacement of the membrane is increased as a current of AC power. The results show the measured magnetic field intensity weakens as the distance between the coil and the Gauss meter probe increases. However, it is observed that the magnetic field intensity does not increase linearly with the number of series coils, which is due to the distance between series coils.

• Periodical: Advanced Materials Research (Volumes 488-489)
• Pages: 1451-1456
• DOI: https://doi.org/10.4028/www.scientific.net/AMR.488-489.1451
• Online since: March 2012
• Authors: Rong Hua Ma, Jian Hao Zhong
• Keywords: Actuator, MEMS, Microcoil, NdFeB Magnet

References

[1] M. Valden, X. Lai, and D. W. Goodman, Science 281, 1647 (1998).

[2] C. A. Mirkin, R. L. Letsinger, R. C. Mucic, and J. J. Storhoff, Nature 382, 607 (1996).

[3] Y. Sun and Y. Xia, Science 5601, 2176 (2002).

[4] D. H. Gracias, J. Tien, T. L. Breen, C. Hsu, and G. M. Whitesides, Science 289, 1170 (2000).

[5] E. Hao, K. L. Kelly, J. T. Hupp, and G. C. Schatz, J. Am. Chem. Soc. 124, 15182 (2002).

[6] J. Huang, Q. Li, D. Sun, Y. Lu, Y. Su, X. Yang, H. Wang, Y. Wang, W. Shao, N. He, J. Hong, and C. Chen, Nanotechnology 18, 105104 (2007).

[7] A. Ahmad, S. Senapati, M. I. Khan, R. Kumar, and M. Sastry, Langmuir. 19, 3550 (2003).

[8] B. Nair and T. Pradeep, Crys. Growth Des. 2, 293 (2002).

[9] T. K. Joerger, R. Joerger, E. Olsson, and C. G. Granqvist, Trends Biotechnol. 19, 15 (2001).

[10] A. R. Shahverdi, S. Minaeian, H. R. Shahverdi, H. Jamalifar, and A. A. Nohi, Proc. Biochem. 42, 919 (2007).

DOI: 10.1016/j.procbio.2007.02.005

[11] H. Zhu, J. Miao, B. Chen, Z. Wang, and W. Zhu, Microsystem Technology. 11, 1121-1126 (2005).

[12] H. Xu, T. Ono, D. Y. Zhang and M. Esashi, Microsystem Technology, 12, 883-890 (2006).

[13] H. K. Ma, B. R. How, H. Y. Lin, M. Y. Lin, J. J. Gao and M. C. Kou, Microsystem Technology, 14, 1001-1007 (2008).

[14] C. Liu, T. Tsao, Y. C. Tai and C. M. Ho, Proceeding of IEEE MEMS, 25-28 (1994).

[15] L. K. Lagorce, O. Brand, M. G. Allen, IEEE J. MEMS. 8, 2-9 (1999).

[16] A.I. Hickerson, D. Rinderkecht, M. Gharib, Exp. Fluid. 38, 534-540 (2005).

[17] A.I. Hickerson, M. Gharib, J. Fluid Mech. 555, 141-148 (2006).

[18] C.Y. Yeo, W.K. Shim, E. Wouterson, T. Li and J. Ma, Funct. Mater. Lett. 1, 225-228 (2008).

[19] A. Borzi, G. Propst, Numerical investigation of the Liebau Phenomenon. Math Phys., 54, 1050-1072 (2003).