Study on Integral Summation Algorithm for Measurement of Superfine Scale Based on Fraunhofer Diffraction

Abstract:

The paper introduces a new method, integral summation algorithm, to measure superfine scale based on Fraunhofer Diffraction. Be different from the traditional method, the paper simulates a series of curve of diffraction luminance distribution on different given size based on Fraunhofer Diffraction theory and researches the closest one to the diffraction curve of unknown slot measured. In order to get more accurate measurement result, the curve is taken by the integral summation algorithm and be compared on the integration area difference instead of comparing the standard deviation. The result shows that the size of given slot is closer to the size of unknown slot than standard deviation method, which somewhat improves the accuracy of the measurement.

• Periodical: Advanced Materials Research (Volume 499)
• Pages: 478-481
• DOI: https://doi.org/10.4028/www.scientific.net/AMR.499.478
• Online since: April 2012
• Authors: Chen Xi Liu, Wei Jin, Ding Ye
• Keywords: Fraunhofer Diffraction, Integral Summation Algorithm, Measurement, Superfine Scale

References

[1] Tang W, Zhou Y, Zhang J. Improvement on theoretical model for thin-wire and slot measurement by optical diffraction. Meas Sci Technol 1999; 10: N119–23.

DOI: 10.1088/0957-0233/10/11/401

[2] Li Fen, Liu Chenxi, Jin Wei. Study on uncertainty about high accurate measurement with Fraunhofer Diffraction for superfine scale based on statistical theory [M]. ICEIM2011, chengdu.

[3] Li Fen, Jin Wei. High-accuracy survey and calculation method based on statistical theory for superfine scale size [M] MCGM2009, Shenyang.