Design and Analysis of Triaxial MEMS High Measure Range Accelerometer

Abstract:

Aming at the demand of the filed of missile fuse and other weapon systems, a triaxial high- g piezoresistive accelermeter with double-terminal fixed beam-mass structure which can measure x and y axial acceleration and four-terminal fixed structure which can measure z axial acceleration. The design and simulation were also verified using Matlab and ANSYS, the simulation results show that the sensitivities in the x and y axial can be to 1.41µV/g, the sensitivity in the z axial can be to 0.56µV/g. And the transverse sensitivities of accelerometer in triaxial are eliminated effectively. The results of simulation analysis show that the structure can work with the measure range of 150,000g

• Periodical: Advanced Materials Research (Volumes 503-504)
• Pages: 735-738
• DOI: https://doi.org/10.4028/www.scientific.net/AMR.503-504.735
• Online since: April 2012
• Authors: Yun Bo Shi, Rui Zhao, Jun Liu, Ke Jie Li
• Keywords: High Measure Range, MEMS, Piezoresistive, Triaxial Accelerometer

References

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