Theoretical Analysis of Chemisorption-Induced Surface Stress

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Abstract:

Atomic/molecular adsorption on a microcantilever surface can cause the cantilever to deflect as a result of the adsorption-induced surface stress. In this paper, based on atomic/molecular interactions, an energy-based model is proposed to calculate the chemisorption-induced surface stress. The connection between the chemisorption-induced surface stress and the covalent bond interactions is established. The results are consistent with relevant experimental observations. This study is helpful for characterizing and optimizing the mechanical response of cantilever-based sensors.

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229-232

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June 2012

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© 2012 Trans Tech Publications Ltd. All Rights Reserved

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