The Design and Optimization of Micro-Displacement Worktable

Dong Ni Guo; Xue Zeng Zhao

doi:10.4028/www.scientific.net/AMR.532-533.167

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HomeAdvanced Materials ResearchAdvanced Materials Research Vols. 532-533The Design and Optimization of Micro-Displacement...

The Design and Optimization of Micro-Displacement Worktable

Abstract:

The micro-displacement worktable is the main part of precise mechanical scanning systems. In the study the worktable is used for single-axis precise positioning and combines a piezoelectric driving element and monolithic flexure hinge mechanism to achieve a compact, vacuum compatible device with the resolution of 0.1nm over the range of 10um.The worktable is designed and optimized on the basis of comparing two types of parallel four-bar flexure hinge mechanism. Additionally, stiffness radio is defined for evaluating the guide performance, and good optimization result is achieved through simulation.

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Periodical:

Advanced Materials Research (Volumes 532-533)

Pages:

167-172

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.532-533.167

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Online since:

June 2012

Authors:

Dong Ni Guo, Xue Zeng Zhao

Keywords:

Lexure Hinge Mechanism, Optimization Design, Stiffness Ratio, Stimulation

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