The Effects of the Sputter-Etching Parameters on the Formation of Conical Protrusions on the Surface of SUS304 Stainless Steel

Tao Bai; Qing Lian Zhang

doi:10.4028/www.scientific.net/AMR.535-537.764

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The Effects of the Sputter-Etching Parameters on the Formation of Conical Protrusions on the Surface of SUS304 Stainless Steel

Abstract:

SUS304 stainless steel samples were sputter-etched by a radio frequency (RF) magnetron sputtering apparatus. Correlations between the formation of conical protrusions on the steel surface and sputter parameters, such as sputter power, anode-to-substrate distance, argon gas flow ratio and sputter-etching time were discussed. The results show that the conical protrusion precipitates both uniformly and densely on the surface with the power being 600W, the anode-to-substrate distance being 50mm, the argon gas flow ratio being 50sccm and the sputter-etching time being 6h.