A Gas Detection System Based on the Micro Light Splitting Principle

Abstract:

This paper presents a novel system for detecting concentration of the CH₄ and CO gases, which exist widely in the coal industry. The system applies micro blazed grating to split the collimated light and may get the infrared absorption light with certain wavelength and bandwidth for the gases detection. The schematic diagram, calculation, signal processing, and setup were described in details. Experimental results indicate that the detection system has the ability to detect methane and carbon monoxide with maximum error of 0.169% and 58.3ppm, stability of 0.76% and 0.22%, respectively.

• Periodical: Advanced Materials Research (Volumes 542-543)
• Pages: 57-65
• DOI: https://doi.org/10.4028/www.scientific.net/AMR.542-543.57
• Online since: June 2012
• Authors: Hai Rong Wang, Wei Zhang, Di Cen, Min Tian
• Keywords: Blazed Grating, Gas Detection System, Infrared Absorption, Light Splitting, Methane Gas

References

[1] Wang H R, Gao X N, Sun G L, Cen D and Jiang Z D, Micro polymer micro-blazed grating fabricated by HEL and its application on sensing methane concentration J.ISTM. Vol.6(2009) 2957-2960

[2] Xiong Y H and Jiang T Y, NDIR Gas Sensors Based on Pulsable IR Source J.Chinese Journal of Scientific Instrument. Vol.11(2003) 4-9

[3] Shi J F, Hui M, Wang D S and Mao W W, Micromation and applications of spectrometers J.Optical Technique. Vol.29(2003) 13-20

[4] Ju H and Wu Y H Development of micro spectrometers J. MEMS Device and Technology. (2003) 30-37

[5] T Otto, R Saupe, A Weiss, V Stock, O Throl, W Grahlert, S Kaskel, H Schreck and T Gessner, MEMS analyzer for fast determination of mixed gas. Proceedings of MOEMS. (2009) 72080E

DOI: 10.1117/12.816231

[6] Zhang Y, Song H and Dai J M, New On-Line Binary Gas Monitoring Instrument Based on Non-Dispersive Infrared Absorption Principle J. INFRARED TECHNOLOGY. Vol.31 (2009) 428-431

[7] Liu M, Tang Z A and Zhang H Q, Coal Mine Methane Detector Based on NDIR Principle J. INSTRUMENT TECHNIQUE AND SENSOR. (2007) 18-20

[8] Wu Y Z, Chen D Y, Guo T F, Cheng W J, Xu H W,Shuli Zheng S L and Liu Q Q, Development of non-dispersive infrared metheane gas transducer J. Journal of China Coal Socity. Vol.32 (2007) 1124-1127

[9] Chen X N, Liu J G, Si F Q and Liu W Q, CO Detection System with Non-dispersed Infrared Absorbance Technique J. Journal of Atmospheric and Environment Optics. Vol.2 (2007) 207-210

[10] Gerhard L, Sandra S and Philippe R, Mems infrared gas spectrometer based on aporous silicon tunable filter J. IEEE. (2001) 578-581

[11] Li H, Xing T W and Ma W L, A Far Infrared Spectrometer Using Grating as Splitting Elements J.Opto-Electronic Engineering. Vol.29 (2002) 44-46