Dynamic Analysis on the H-Type Stage Using Largrange Method

Abstract:

Dynamic performance in the H-type stage as precision positioning system is important specification to guarantee precise accuracy. As the range of the H-type stage has increased, the dynamic performance affects the settling time of the H-type stage. This article concentrates analysis of the dynamic modeling of the H-type stage with rotational flexure joint. The dynamic modeling of the H-type stage was analyzed using Lagrange method assumed as lumped mass-spring system. The dynamic modeling of the H-type stage was verified by the experiment.

• Periodical: Advanced Materials Research (Volumes 542-543)
• Pages: 663-666
• DOI: https://doi.org/10.4028/www.scientific.net/AMR.542-543.663
• Online since: June 2012
• Authors: Kyoungchon Kim, Dae Gab Gweon, Dong Pyo Hong, Byoungkuk Lee
• Keywords: Dynamic Analysis, H-Typestage, Lagrange Method, Precise Motion, Settling Time

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