Phase Field Modeling of Multilayer Epitaxial Growth

Wei Yang; Lu Feng; Jing Wang; Yi Hao

doi:10.4028/www.scientific.net/AMR.557-559.2396

Paper Titles

Nonlinear Stain of Variable Cross-Section Beam Element Based on Positional FEM
p.2371

Numerical Simulation of Laminar Flow Field in a Stirred Tank with a Rushton Impeller or a Pitch 4-Bladed Turbine
p.2375

Two-Phase Flow CFD Simulations of Bubble Crystallization Tube
p.2383

Numerical Simulation on the Effective Thermal Conductivity of Porous Material
p.2388

Phase Field Modeling of Multilayer Epitaxial Growth
p.2396

Solution of Gas Explosion Load and Simulation of Dynamic Response of Multilayer Structures
p.2401

The Damage Mechanics Model of the Sidewall Rock under the Effect of Shear Stress
p.2406

Simulation of Fatigue Life Prediction and Enhancement of Connecting Rod of Car Engine
p.2410

Effect of Heating Parameters on the Part’s Properties in Hot Stamping Process
p.2417

HomeAdvanced Materials ResearchAdvanced Materials Research Vols. 557-559Phase Field Modeling of Multilayer Epitaxial...

Phase Field Modeling of Multilayer Epitaxial Growth

Abstract:

We report simulations of multilayer epitaxial growth using a previously proposed continuum phase ﬁeld model [2, 5]. For island growth in the multilayer regime, this phase-ﬁeld model reproduces mound structures consistent with experimental images concerned. We focus on the evolution of morphology on multilayer islands under a certain condition. Roughness of epitaxial surface increases rapidly with the coverage increasing when the deposition rate is larger than a critical value. Layer-by- layer growth is the most primary method among the styles of islands growth under low deposition rate. Roughness is independent of temperature, when the temperature is larger than a critical value.