Automatic Monitoring of Vacuum System on Transmission Electron Microscope by Event-Based Approach

Abstract:

The vacuum system control strategy based on event-driven approach is considered for monitoring startup status, stable operation status, shutdown status and failure processing of transmission electron microscope (TEM). Hierarchical structure is adopted so as to reasonably compartmentalize the vacuum control tasks. For startup operation, control logic flow of vacuum system is designed by event-based control mode. Finally, through the actual operation of the test results indicate that the vacuum control system fulfills design requirements and the event-based control mode is effective.

• Periodical: Advanced Materials Research (Volumes 562-564)
• Pages: 1193-1196
• DOI: https://doi.org/10.4028/www.scientific.net/AMR.562-564.1193
• Online since: August 2012
• Authors: Yong Jun Cui, Quan Lin Dong, Xiu Yan Zhang
• Keywords: Event-Based Control, Hierarchical Structure, Transmission Electron Microscope, Vacuum System

References

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