Review of Microelectrode Fabrication

Abstract:

With the development of electrode technology and deepening research on bio-medical discovery, various micro-neuron probes have been designed and manufactured. Electrodes, a carrier of stimulating and recording neuron signals consists of the main part of probe. In the last ten years, as the micro-manufacturing technology constantly develops and creates, the electrode structure has been integrated onto a new level. The article will give a compound conclusion on the manufacture methods of the main electrode types in the course of development.

• Periodical: Advanced Materials Research (Volume 565)
• Pages: 503-507
• DOI: https://doi.org/10.4028/www.scientific.net/AMR.565.503
• Online since: September 2012
• Authors: Pei Chao Liu, Jun Zhou, Shou Lei Li, Hong Ming Ma
• Keywords: Developing Course, Manufacturing Method, Micro-Electrode

References

[1] Qing Bai, Kensall D. Wise, David J. Anderson. A High-Yield Microassembly Structure for Three-Dimensional Micro-electrode Arrays [J]. IEEE Transactions on Biomedical Engineering, 2000, 47(3) : 2812289.

DOI: 10.1109/10.827288

[2] Richard A. Normann, Edwin M. Maynard, Patrick J. Rousche, et al. A Neural Interface for a Cortical Vision Pros-thesis [J]. Vision Research, 1999, 39: 257722587.

DOI: 10.1016/s0042-6989(99)00040-1

[3] Takeshi Kawano, et al. Three-dimensional Multichannel Si Microprobe Electrode Array Chip for Analysis of the Nervous System.

[4] Norlin P, Kindlundh M, Mouroux A, et al. A 32—site neural recording probe fabricated by DRIE of SOI substrates [J]. J Micromech Microeng, 2002, 12(4): 414—419.

DOI: 10.1088/0960-1317/12/4/312

[5] Huai-Yuan Chu. et al. Design and fabrication of novel three-dimensional multi-electrode array using SOI wafer. Sensors and Actuators A 130–131 (2006) 254–261.

DOI: 10.1016/j.sna.2006.02.010

[6] Campbell PK, Jones KE, Huber RJ, et al. A silicon-based, three-dimensional neural interface manufacturing processes for an intracortical electrode array [J]. IEEE Trans Biomed Eng, 1991, 38(8): 758—768.

DOI: 10.1109/10.83588

[7] KE, Campbell PK, Normann RA. A glass/ silicon composite intracortical electrode array [J]. Ann Biomed Eng, 1992, 20(4): 423—437.

DOI: 10.1007/bf02368134

[8] Fofonoff T, Martel S, Hunter I. Assembly-ready brain microelectrode arrays [J]. IEEE EMBS, 2003, 2: 1937-(1940).

[9] S.J. Takeuhi, T. Suzuki, K. Mabuchi and H. Fujita, 3D flexible multichannel neural probe Array, J. Micromech. Microeng. 14(2004) 104–107, Mar. (2003).

DOI: 10.1088/0960-1317/14/1/014

[10] Arash A. Fomani, Student Member, IEEE , M. Moradi, Member, IEEE , S. Assaf, and Raafat R. Mansour, Fellow , IEEE. 3D Microprobes for Deep Brain Stimulation and Recording, 32nd Annual International Conference of the IEEE EMBS Buenos Aires, Argentina, August 31 - September 4. (2010).

DOI: 10.1109/iembs.2010.5626410

[11] Kennedy PR. The cone electrode: a long—term electrode that records from neurites grown onto its recording surface [J]. J Neurosci Methods, 1989, 29(3): 181—93.

DOI: 10.1016/0165-0270(89)90142-8