Implementation of Autonomous Maintenance in Semiconductor Industry: A Case Study

Hasnida Ab-Samat; Poh Guat Khoe; Wai Shan Liau; Hsu Fen Tan; Wan Yee Yap; Shahrul Kamaruddin

doi:10.4028/www.scientific.net/AMR.591-593.708

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HomeAdvanced Materials ResearchAdvanced Materials Research Vols. 591-593Implementation of Autonomous Maintenance in...

Implementation of Autonomous Maintenance in Semiconductor Industry: A Case Study

Abstract:

Maintenance is a vital component in ensuring machines to run smoothly. While, maintenance technicians are responsible in conserving the conditions of machine by performing regular inspections. This study was conducted to investigate the performance of maintenance system in a company by identifying the critical machine with the highest breakdown frequency and time. It was found that high breakdown was due to the high workload of technicians, where no extra time can be allocated for thorough inspection task. Technicians do not have enough support in performing maintenance task. In this paper, Autonomous Maintenance (AM) program is suggested to reduce technicians’ workload through operators’ involvement. Technicians work is reduced with the aid of operators, which gives them more time for other maintenance tasks. The AM process flow is implemented in a case study company as a verification and validation processes.

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Periodical:

Advanced Materials Research (Volumes 591-593)

Pages:

708-711

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.591-593.708

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Online since:

November 2012

Authors:

Hasnida Ab-Samat, Poh Guat Khoe, Wai Shan Liau, Hsu Fen Tan, Wan Yee Yap, Shahrul Kamaruddin

Keywords:

Autonomous Maintenance, Maintenance System, Technician, Workload

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