Perpendicular Axis Magnetorheological Finishing of Spherical Optics

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Abstract:

Magnetorheological Finishing, MRF can achieve deterministic results on different surface shapes such as flat surfaces, spherical surfaces and aspheric surfaces. MRF can also overcome many drawbacks of the conventional polishing process. The schedule uncertainties driven by edge roll and edge control are virtually eliminated with the MRF process. This paper presents a polishing wheel that combines rotation motion with revolution motion while renewing the MR fluid. Stable removal characteristic can be obtained by using the composite-rotation wheel. This paper also presents some recent results of the deterministic finishing typified by the tool and its MR fluid circulation system. An example of finishing a square optical workpiece with spherical surface will be reviewed.

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161-165

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December 2012

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© 2013 Trans Tech Publications Ltd. All Rights Reserved

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