Systematic Study of Resonant Pattern in Ellipsoidal Microwave Cavities

Abstract:

Resonant pattern in ellipsoidal microwave cavities were analyzed systematically in this article. Electric field distribution in cavities with different sizes was calculated by the finite difference time-domain method (FDTD). The results of the simulation show that, the microwave fed in though antenna, two different transmission patterns be formed in the microwave cavities, when the R and Z were properly chosen．In the first case, only one strong electric field area was formed at the bottom of the ellipsoidal cavity. For the second case, two main strong electric-field areas around the focal points, resonant series “TM_0mn” mode were also found, the size of ellipsoid resonant cavities reveals obvious regularity in the resonant series, the electric-field shape of a resonant mode is similar with each other except that the intensity of the two main strong electric-field areas. In the same resonant mode, z has a good linear correlation with r. the research results of the ellipsoidal microwave cavities with two main strong electric-field areas will provide more choices for design new plasma reactors.

• Periodical: Advanced Materials Research (Volume 629)
• Pages: 187-191
• DOI: https://doi.org/10.4028/www.scientific.net/AMR.629.187
• Online since: December 2012
• Authors: Xiao Jing Li, Shun Qi Zheng, Bao Rong Zhao, Xi Wen Zhang, Wei Zhong Tang
• Keywords: Ellipsoidal Microwave Cavity, Microwave Plasma Reactor Design, Numerical Simulation, Resonant Pattern

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