Effect of Oxygen Incorporation on the Properties of AlF₃ Films

Abstract:

In order to reveal the influence of oxidization on the properties of AlF₃ films, single layers of AlF₃ were deposited at different substrate temperature by thermo evaporation technique with or without oxygen injected into the coating chamber. The chemical composition, total stress, optical properties and laser damage resistance of samples were characterized. Comparative study indicates the AlF₃ films prepared under higher oxygen pressure have more oxides which result from hydration process in atmosphere. The presence of oxides also reduces total stress and optical absorption of the fluoride coatings.

• Periodical: Advanced Materials Research (Volumes 631-632)
• Pages: 121-126
• DOI: https://doi.org/10.4028/www.scientific.net/AMR.631-632.121
• Online since: January 2013
• Authors: Xu Li, Jian Sun, Wei Li Zhang, Yong Qiang Hou, Kai He, Kui Yi
• Keywords: AlF₃ Film, LIDT, Optical Constant, Oxygen Incorporation, Total Stress

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