Modal FEM Analysis Using Weak Form Equations for a Microgyroscope with Bulk Giant Magnetostrictive Material (GMM) Resonator

Abstract:

The structure and operation principle of a novel solid MEMS gyroscope with bulk giant magnetostrictive material (GMM) resonator are presented. A finite element method (FEM) for modal analysis of the GMM resonator is employed in which the fundamental magnetoelastic governing equations of the GMM are solved numerically using weak form equations of COMSOL Multiphysics. For a bulk GMM with size of 4×4×4 mm³, it is found that the third order vibration mode with frequency of 182 kHz meets working vibratory mode of the gyro sensor, which is verified by harmonic response analysis. Compared with analogy method which simulates the GMM as piezoceramics, this method is more practically reflect the operation state of GMM resonator of the microgyro due to consideration of Maxwell force in the weak form equations. This paper provides important basis for further full magnetic electromechanical coupling analysis of the microgyroscope.

• Periodical: Advanced Materials Research (Volume 650)
• Pages: 513-517
• DOI: https://doi.org/10.4028/www.scientific.net/AMR.650.513
• Online since: January 2013
• Authors: Lei Yang, Feng Cui, Wu Liu, Xiao Sheng Wu, Wei Ping Zhang, Wen Yuan Chen
• Keywords: Finite Element Method (FEM), Giant Magnetostrictive Material (GMM), MEMS, Microgyroscope, Weak Form

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