Micro-Channel Fabrication on Quartz Crystals by a Micro Abrasive Air Jet

Jing Ming Fan; Jun Wang

doi:10.4028/www.scientific.net/AMR.652-654.2159

Paper Titles

Effects of Mixing Chamber Shape on Cutting Performance in Abrasive Water Jet
p.2134

Evaluation Influences of Residual Stress on Machining Aluminum Part of Cooling Plates
p.2140

Experiment Studies of Nd:YAG Laser Assisted Dressing Technique for Metal-Bonded CBN Grinding Wheel by Crankshaft Grinding
p.2147

Influence of Tooth Errors and Truing Principles of Grinding Wheel Abrasion for Machining Arc Enveloping Worm
p.2153

Micro-Channel Fabrication on Quartz Crystals by a Micro Abrasive Air Jet
p.2159

Microgrooving Using an Ultrafine Wire Tool
p.2164

Study of the Wear of Drills in Dry Drilling of NM360 Steels
p.2169

Analysis of Plunge Milling Force and Tool Deformation on Cr12
p.2173

Determination of the Cutting Area Considering the Tool Slenderness Ratio for the Development of a 5-Axis Impeller Machining Automation CAM Module
p.2178

HomeAdvanced Materials ResearchAdvanced Materials Research Vols. 652-654Micro-Channel Fabrication on Quartz Crystals by a...

Micro-Channel Fabrication on Quartz Crystals by a Micro Abrasive Air Jet

Abstract:

Abrasive air jet micro-machining is a new promising technology for processing brittle material. An experimental study of micro-channeling on quartz crystals using an abrasive air jet is presented. The effect of the processing parameters on the produced channel profile such as the channel width, depth and kerf taper angle is analyzed, along with the effect on the roughness of channel bottom surfaces. Plausible trends of the major process performance measures with respect to the process parameters have been revealed. These trends are useful in guiding the selection of process parameters in practice.

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Periodical:

Advanced Materials Research (Volumes 652-654)

Pages:

2159-2163

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.652-654.2159

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Online since:

January 2013

Authors:

Jing Ming Fan, Jun Wang

Keywords:

Abrasive Air Jet, Micro Machining, Micro-Channel, Quartz Crystals

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