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Arbitrary Structures Fabricated by Focused Ion Beam Milling

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Abstract:

Optical components at the nanoscale are crucial for developing photonics and integrated optics. Device with ultrasmall dimensions is of particular importance for nanoscience and electronic technology. Among all the manufacturing tools, the focused ion beam is a critical candidate for machining and processing optical devices at the nanoscale. Here, we experimentally demonstrate the fabrication of nanodevices with arbitrary shapes and different potential applications using focused ion beam techniques.

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Periodical:

Advanced Materials Research (Volume 661)

Pages:

66-69

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.661.66

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Online since:

February 2013

Authors:

Xiao Xiao Jiang, Feng Wen Wang, Zhen He Ma, Qiong Chan Gu, Jiang Tao Lv, Guang Yuan Si

Keywords:

Arbitrary Shapes, Focused Ion Beam (FIB), Nanodevices

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© 2013 Trans Tech Publications Ltd. All Rights Reserved

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