Characterization of Integrated GMR Sensor with Angular Variation

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In this work, GMR multilayer films are deposited and then processed into GMR sensors. The transfer curves of GMR sensor are acquired by sweeping the signal magnetic field in different directions. In addition, the rotation behavior is measured by rotating a magnitude-fixed field around the sensing axis. The results are analyzed and it’s found that the angular dependence of GMR sensor can be characteristic with cosine function.

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746-749

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February 2013

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© 2013 Trans Tech Publications Ltd. All Rights Reserved

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