Humidity Sensor Using CVD Deposited SnO₂ Thin Film

Abstract:

In this paper we address sensitivity of SnO2 thin film deposited by thermal chemical vapor deposition in terms of its behavior towards humidity variations. The structural, optical and electrical properties of SnO2 thin film deposit at different substrate temperature grown by thermal chemical vapor deposition (CVD) are also reviewed. FESEM image reveal smallest particle size of SnO2 at substrate temperature 500°C. Pl measurement shows red shift of SnO2 at substrate temperature 500°C. All thin film performing slightly linear sensitivities towards relative humidity (RH%).

• Periodical: Advanced Materials Research (Volume 667)
• Pages: 415-420
• DOI: https://doi.org/10.4028/www.scientific.net/AMR.667.415
• Online since: March 2013
• Authors: A.K.S. Shafura, N.D. Md Sin, Mohamad Hafiz Mamat, S. Ahmad, Mohamad Rusop Mahmood
• Keywords: Humidity Sensor, Sensitivity, SnO₂, Thermal CVD

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