Study on Parameters Optimization in Ultra-Precise Processing of Germanium Substrate

Xun Lv; Ju Long Yuan; Yang Yu Wang; Qian Fa Deng

doi:10.4028/www.scientific.net/AMR.69-70.442

Paper Titles

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Study on 5-Axis Machining Key Technology of High-Precision Aluminum Alloy Integral Impeller
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Process Parameters Selection in NC Camshaft Grinding Based on Uniform Design and GA-NN
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Study on Parameters Optimization in Ultra-Precise Processing of Germanium Substrate
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Research on the Adaptive Machining Technology of Blisk
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Experimental Study on High Speed Machining of a Titanium Alloy
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Structural Design Method of High Speed Face Milling Cutter Based on Theory of Axiomatic Design
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Real-Time NURBS Interpolator with an Optimal Feed for High-Speed Machining
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HomeAdvanced Materials ResearchAdvanced Materials Research Vols. 69-70Study on Parameters Optimization in Ultra-Precise...

Study on Parameters Optimization in Ultra-Precise Processing of Germanium Substrate

Abstract:

To improve efficiency in ultra-precision lapping germanium (Ge) substrate, a new ultra-precise process technology is introduced in this paper. Two steps ultra-precise process were semi bonded abrasive lapping in rough machining, and CMP process in finish machining. A good surface quality workpiece was obtained in semi bonded abrasive lapping process efficiently. Several machining parameters were compared and applied. After CMP process, the mirror-like surface of Ge substrate was obtained.