An Analytical Method of Time Character of Electron Beam Current Density on Transmission Electron Microscope Imaging

Abstract:

An analytical method of time character of electron beam current density is required for transmission electron microscopy (TEM) imaging research. By studying the imaging principle of TEM, the relational expression between current density on fluorescent screen and exposure time is deduced. The actual data of numerical relation between current density and exposure time are gained by the exposure experimentation with the master sample on the TEM test equipment. Furthermore, the parameter value in expression is computed by linear fit using the least squares method, and then the concrete relational expression between current density and exposure time about the TEM test equipment is obtained. As a result, using the concrete relational expression on the TEM test equipment, the automatic exposure experimentation on some samples is completed on the different operating mode, and the relatively clear-cut TEM images are formed. The experimentation results indicate that the automatic exposure method is correct and parameter calibration is valid.

• Periodical: Advanced Materials Research (Volumes 694-697)
• Pages: 1372-1376
• DOI: https://doi.org/10.4028/www.scientific.net/AMR.694-697.1372
• Online since: May 2013
• Authors: Xiu Yan Zhang, Quan Lin Dong
• Keywords: Electron Beam Current Density, Least-Square Method (LSM), Parameter Calibration, Time Character

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