Optical Sensing Properties Optimization of a Slot-Waveguide-Based Silicon Ring Resonator Biosensor

Abstract:

An optical biosensor with a slot-waveguide-based micro-ring resonator on silicon-on-insulator (SOI) is reported. By numerical analyzing, a small-sized sensor of 25×15μm² with a sensitivity of 594nm/RIU can be achieved for NaCl solution, which is about eight times of that of the conventional micro-ring sensor. The free spectral range of 25.6nm and a quality factor Q of 430 are also observed. If SNR is more important, an asymmetric coefficient of 0.7 can be introduced to enhance Q factor. Our analysis also shows that the sensor has good sensing characteristics to other organic solutions.

• Periodical: Advanced Materials Research (Volume 710)
• Pages: 395-399
• DOI: https://doi.org/10.4028/www.scientific.net/AMR.710.395
• Online since: June 2013
• Authors: Liang Gao, Guo Hui Yuan, Jun Wang, Yu Ren Chen
• Keywords: Biosensor, Ring Resonator, Silicon-on-Insulator (SOI), Slot Waveguide

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