Fast Response MEMS VOA with Grid-Type Shutter

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Abstract:

In this paper, a microelectromechanical variable optical attenuator (VOA) with grid-type shutter is described. The device is used to control the power in the all optical nelworks. Besides the advantage of good switching performance and the relatively low driving voltage, its fabrication is simple and reliable. In our laboratory, a MEMS VOA with grid-type shutter has been fabricated and setup for investigation. Experimental results have shown that the proposed approaches improve the VOA performance.

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Advanced Materials Research (Volumes 712-715)

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2206-2209

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June 2013

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© 2013 Trans Tech Publications Ltd. All Rights Reserved

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