Fabrication of Micro Patterned Substrate by Powder Injection Molding

Abstract:

In this study, a micro patterned substrate was manufactured by micro powder injection molding (μPIM). As a mold for forming the micro patterned substrate, a metal mold having a linewidth of 100 um was fabricated by micro photo etching process. The specimen prepared through such a process had a sound shape at a shrinkage rate of 16.7% with respect to the mold. To verify industrial applicability of the micro patterned substrate, a micro-fluidic device was fabricated using a smooth flow of fluid therethrough. These results indicated that the micro powder injection molding is useful for micro-fluidics.

• Periodical: Advanced Materials Research (Volumes 753-755)
• Pages: 141-144
• DOI: https://doi.org/10.4028/www.scientific.net/AMR.753-755.141
• Online since: August 2013
• Authors: Hyeong Jae Lee, Jin Man Jang, Jin Hyung Lee, Yong In Kim, Sung Chan Park, Se Hyun Ko, Won Sik Lee
• Keywords: Micro Fluidic Device, Micro Powder Injection Molding, PIM

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