Design of a Compact 3-DOF In-Plane Motion Stage

Jae Hyun Park; Hak Jun Lee; Dae Gab Gweon; Dong Pyo Hong

doi:10.4028/www.scientific.net/AMR.753-755.863

Paper Titles

Surface Free Energy of Boron-Compounds Modified Poplar Veneer
p.843

Study on the Effect of Impregnation Process on Physical and Mechanical Properties of Chinese Fir LVL
p.848

Research on Comprehensive Mechanized Efficient Construction Technology of Large Section Shaft in Hecaogou Mine
p.853

Flexural Wave Propagation Characteristics of Lattice Sandwich Plates
p.857

Design of a Compact 3-DOF In-Plane Motion Stage
p.863

Research on Motion Simulation Analysis of Rotary Parts Based on Solidworks
p.867

The Simulation Analysis on the Heat Transfer Model of Bloom
p.872

A Multi-Body Kinetics Intelligent Simulation Based Design Method for Hydraulic Support
p.876

Exploration of the Modeling Process of Assembly Based on MBD and Pro/ENGINEER
p.880

HomeAdvanced Materials ResearchAdvanced Materials Research Vols. 753-755Design of a Compact 3-DOF In-Plane Motion Stage

Design of a Compact 3-DOF In-Plane Motion Stage

Abstract:

This paper presents the design of a new compact three-axis in-plane motion stage which work directions are X, Y, θz. The proposed stage consists of four amplification flexure structures and four piezoelectric actuators. The amplification structure uses bridge type amplification mechanism and notch type flexure guide hinge. The size of the stage is 150×150×30mm³ and has 50×50mm² hollow in the center of the stage.