The Accurate Method for Removing Misalignment Errors from Testing Rectangular Optics

Abstract:

The limitations of current interferogram reduction software with Zernike polynomials in analyzing rectangular interferogram are illuminated. The Zernike polynomials are no longer orthogonal over an rectangular region and have no explicit physical meanings. The reasonable mathematical model for removing translation errors is established based on least squares fitting. The experiment is carried on with a 200mm×75mm aspherical mirror by null-compensation, the misalignment errors can be eliminated from the original phase distribution exactly, thus the accurate surface map is gained, so it provides a guarantee for the superprecision fabrication.

• Periodical: Advanced Materials Research (Volumes 760-762)
• Pages: 219-222
• DOI: https://doi.org/10.4028/www.scientific.net/AMR.760-762.219
• Online since: September 2013
• Authors: Zhu Li, Xiao Kun Wang, Song Li
• Keywords: Least Square Fitting, Misalignment Errors, Rectangular Optics, Zernike Polynomial

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