Structure Design of a Novel Biaxial Piezoelectric Actuated Stage

Abstract:

In this paper, a disk piezoelectric actuator structure - 4-9-9-14 piezoelectric actuator is constructed, and it is made of piezoelectric buzzer to drive a novel biaxial piezoelectric actuated stage. The 4-9-9-14 piezoelectric actuator offers a better balanced capability of forward rotation and reverse rotation than the conventional edge-driving piezoelectric actuator. The biaxial piezoelectric actuated stage structure comprises a base, a V-shaped guide rail, an optical scale measurement system, a preload adjusting structure, and a load-carrying stage. The movement of a stage is read and analyzed by means of LabVIEW operating in conjunction with an optical scale. Stage movement-related signals read by the optical scale are processed. With a human-machine interface of LabVIEW, the movement of the stage is depicted by a waveform chart to thereby facilitate the observation of the waveform chart and the understanding of propulsion of the stage by the actuator.

• Periodical: Advanced Materials Research (Volumes 765-767)
• Pages: 96-99
• DOI: https://doi.org/10.4028/www.scientific.net/AMR.765-767.96
• Online since: September 2013
• Authors: Shann Chyi Mou
• Keywords: Biaxial Piezoelectric Actuated Stage, Buzzer, Disk Piezoelectric Actuator, Preload Adjusting Structure

References

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