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Research on Ingot Casting Process and Properties of Poly-Silicon
Abstract:
Temperature gradient and solidification rate are two key parameters during polysilicon directional solidification, which are varied to improve the polysilicon production process. Dendritic growth, distribution of impurities, Minority carrier lifetime and resistivity mapping are also discussed in this paper. A better quality of polysilicon ingot is presented by optimized casting process.
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Pages:
739-743
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Online since:
September 2013
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© 2013 Trans Tech Publications Ltd. All Rights Reserved
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