Study on Undercut Characteristics of Die Steel in Spray Etching

Qing Song; Zhao Qin Yu; Zhong Ning Guo; Guan Wang; Hong Guang Huang

doi:10.4028/www.scientific.net/AMR.774-776.1080

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HomeAdvanced Materials ResearchAdvanced Materials Research Vols. 774-776Study on Undercut Characteristics of Die Steel in...

Study on Undercut Characteristics of Die Steel in Spray Etching

Abstract:

The NAK80 die steel was processed in spray etching with mask preprocessing.The effect of the mask gap width and etching depth on the undercut ratio was investigated . The result shows that with the increase of the mask gap width the effect of the etching depth on the undercut ratio increases. Based on the experiment, the relation of the mask gap width, the etching depth and the undercut ratio is obtained.

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Periodical:

Advanced Materials Research (Volumes 774-776)

Pages:

1080-1084

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.774-776.1080

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Online since:

September 2013

Authors:

Qing Song, Zhao Qin Yu, Zhong Ning Guo, Guan Wang, Hong Guang Huang

Keywords:

Etching Depth, Mask Gap Width, Spray Etching, Undercut Ratio

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